Title: |
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
|
Abbrev: |
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY PART B MICROELECTRONICS PROCESSING |
Abbrev: |
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS PROCESSING AND PHENOMENA |
Abbrev: |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, MICROELECTRONICS PROCESSING AND PHENOMENA |
Abbrev: |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B |
Alternative: |
Journal of Vacuum Science and Technology B |
Alternative: |
Journal of Vacuum Science and Technology |
Alternative: |
Journal of Vacuum Science & Technology |
ISSN: |
0734-211X |
LCCN: |
2006263268 |
Peer-Reviewed:
|
Yes
|