Název: |
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
|
Zkrácený: |
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY PART B MICROELECTRONICS PROCESSING |
Zkrácený: |
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS PROCESSING AND PHENOMENA |
Zkrácený: |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B, MICROELECTRONICS PROCESSING AND PHENOMENA |
Zkrácený: |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B |
Alternativní: |
Journal of Vacuum Science and Technology B |
Alternativní: |
Journal of Vacuum Science and Technology |
Alternativní: |
Journal of Vacuum Science & Technology |
ISSN: |
0734-211X |
LCCN: |
2006263268 |
Recenzováno:
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Ano
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