| Title: |
Ieee Transactions on Semiconductor Manufacturing
|
| Abbrev: |
IEEE TRANS SEMICOND MANUF |
| Abbrev: |
IEEE TRANS SEMICONDUCT MANUF |
| Abbrev: |
IEEE T SEMICONDUCT M |
| Abbrev: |
IEEE SEMIC |
| Abbrev: |
SEMICONDUCTOR MANUFACTURING, IEEE TRANSACTIONS ON |
| Abbrev: |
IEEE TRANS. SEMICOND. MANUF |
| Alternative: |
Semiconductor Manufacturing IEEE Trans. on |
| ISSN: |
0894-6507 |
| LCCN: |
88659341 |
|
Peer-Reviewed:
|
Yes
|
| |
| Availability: |
IEEE Electronic Library (IEL)
|
| |
|
|
|
Available from
1988
volume: 1
issue: 1
|
|
| Authentication: |
NTK |
| |
| Availability: |
IEEE Electronic Library (IEL) Journals
|
| |
|
|
|
Available from
1988
volume: 1
issue: 1
|
|
| Authentication: |
NTK |
